Korea DGIST selects Aixtron system to produce single nanotube array

On August 9, Ai Siqiang said that the company had received an order from the Daegu Gyeongbuk Institute of Science and Technology (DGIST) in South Korea. A contracted BM II (2 inch) system will be used for carbon nanotube (CNT) array deposition of 3D devices such as nano-antennas, nano-rectifiers and more. The system has been installed and commissioned by Ai Siqiang's local service team.

“The unique equipment we are developing requires precise control of the carbon nanotube deposition position to achieve a single vertical alignment,” said Professor Jae Eun Jang of DGIST Information and Communication Engineering. “And this is plasma-based love. The BM system is superior to other systems we are considering. In fact, the BM system enables us to reliably achieve the most growth parameters and nanotube arrangement in a reproducible manner during carbon nanotube growth. Good control."

Although research on carbon nanotube devices has made great strides in the past decade, precise control of the number and location of nanotubes over large areas (the technology necessary to produce integrated circuits) is only one of the major challenges. . DGIST uses Ai Siqiang's BM system to solve these problems.

Professor Jae believes that the BM system is capable of accurately controlling the individual vertical growth of carbon nanotubes at predetermined locations according to the required size through a process compatible with existing silicon technology. The vertical orientation of a single nanotube is a key element that allows them to significantly reduce the unit area of ​​the device based on traditional equipment. This vertical nanotube can be applied not only to electronics and communication equipment, but also to innovative applications such as nanoelectromechanics and robotic systems.

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